Cleanroom Showcase: MEMS

At the invitation of Vicky Diadiuk and the Microsystems Technology Laboratories (MTL), I had the opportunity to enroll in MIT course 6.152J Micro Nano Process Technologies. To spend a week in a bunny suit, learning about the process tools and cleanroom operations was an incredible learning experience.

Over the course of the week, we fabricated three devices: a MOSCAP device, a MEMS device, and a Microfluidic device. In this video segment, I briefly describe the fabrication process for a MEMS device.

For more on my week in the cleanroom, check out the showcase trailer here!

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