Five Ways to Right-Size Energy Efficiency in Cleanrooms

full presentation here.

Energy efficiency has become a priority in architectural design; and as a result, energy consumption has reduced astronomically for academic and office buildings. Yet, high performance facilities are lagging behind. The question is – why?

Simply put – cleanrooms are energy hogs. The amount of energy required to run high-performance facilities is an order of magnitude greater than typical lab or academic buildings. Cleanroom energy standards are outdated and baselines for these facilities are not easily determined because of dramatic variations in use. Unlike other science/engineering facilities and academic buildings, the variation in cleanrooms isn’t necessarily determined by the size of the building or number of rooms. The research, tools required to perform it, and environmental requirements for those tools are the main sources of energy consumption. Often, these sources are very different from cleanroom to cleanroom. So, how do you reduce energy use in cleanrooms?

Right-size systems

From our experience on the LISE cleanroom at Harvard University, and with the help of the data provided by institutions we surveyed, we determined key parameters that help streamline the variation and guide design for right-sizing energy efficiency in cleanrooms.

  1. Consider tool load average to be 5 – 20 W/SF.
  2. Implement turn down measures (ie. occupancy sensors or particle counters).
  3. Design supply air temperature based on dewpoint.
  4. Design for ramp-up/ramp-down.
  5. Meter consumption for future benchmarking data.

For more details, see the full presentation here.

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